October 15, 1986 article Silicon-to-silicon direct bonding method Journal of Applied Physics DOI: 10.1063/1.337750 OpenAlex Authors 0 Author list not loaded yet. Cited by 6 stored of 511 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Silicon pore optics: a mature and adaptable x-ray mirror technology 2023 conference-paper Physics and Astronomy Astronomy and Astrophysical Research 4 citations Laser Transmission Bonding 2023 RWTHedition book-chapter Engineering Electronic Packaging and Soldering Technologies 0 citations Silicon Pore Optics 2022 Springer eBooks book-chapter Physics and Astronomy Astronomy and Astrophysical Research Open access 2 citations Design and modeling of a Laue lens for radiation therapy with hard x-ray photons 2021 Physics in Medicine and Biology article Physics and Astronomy Advanced Radiotherapy Techniques Open access 6 citations Impact of annealing on performance of X-ray mirror coatings for Athena 2021 conference-paper Physics and Astronomy Astronomy and Astrophysical Research Open access 3 citations Plasma etching for the compatibility of thin film metallic coatings and direct bonding of silicon pore optics 2020 Journal of Applied Physics article Engineering 3D IC and TSV technologies Open access 15 citations 6 results References 0