Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma

• Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology

  2025 Metrologia article Decision Sciences Scientific Measurement and Uncertainty Evaluation Open access

  5

  citations
• Pulsed Plasma EUV Sources

  2023 RWTHedition book-chapter Engineering Advancements in Photolithography Techniques

  0

  citations
• EUV Measurement Technologies

  2023 RWTHedition book-chapter Engineering Advancements in Photolithography Techniques

  0

  citations
• Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation

  2022 Applied Optics article Engineering Advancements in Photolithography Techniques

  12

  citations
• High-precision optical constant characterization of materials in the EUV spectral range: from large research facilities to laboratory-based instruments

  2022 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques

  2

  citations
• Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet

  2022 Journal of Micro/Nanopatterning Materials and Metrology article Engineering Advancements in Photolithography Techniques Open access

  9

  citations
• High speed imaging of Z-pinch gas discharge in extreme ultraviolet and model-based three-dimensional reconstruction of emitting volume

  2022 Review of Scientific Instruments article Engineering Plasma Diagnostics and Applications

  3

  citations
• Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings

  2020 conference-paper Engineering Advancements in Photolithography Techniques

  5

  citations
• Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup

  2020 Optics Express article Engineering Advancements in Photolithography Techniques Open access

  16

  citations

9 results