June 14, 2013 article Open access Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography Nanotechnology DOI: 10.1088/0957-4484/24/27/275705 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 4 stored of 37 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Replacing Doping in Nano-Silicon: Ultimate Miniaturization, Energy Efficiency, and Cryo-Functionality 2025 ACS Applied Materials & Interfaces article Engineering Advancements in Semiconductor Devices and Circuit Design Open access 2 citations Analyzing Carrier Density and Hall Mobility in Impurity‐Free Silicon Virtually Doped by External Defect Placement 2024 Advanced Functional Materials article Engineering Advancements in Semiconductor Devices and Circuit Design 10 citations Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping 2023 physica status solidi (a) article Engineering Advancements in Semiconductor Devices and Circuit Design Open access 2 citations Turning Low-Nanoscale Intrinsic Silicon Highly Electron-Conductive by SiO2 Coating 2021 ACS Applied Materials & Interfaces article Materials Science Silicon Nanostructures and Photoluminescence Open access 9 citations 4 results References 0