April 01, 1977 article Diffraction grating transmission efficiencies for XUV and soft x rays Applied Optics DOI: 10.1364/ao.16.001088 OpenAlex Authors 0 Author list not loaded yet. Cited by 6 stored of 126 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: mask and illumination parameter optimization 2024 Journal of Micro/Nanopatterning Materials and Metrology article Engineering Advancements in Photolithography Techniques Open access 0 citations Development of an ultra-compact inline transmission grating spectrograph for extreme ultraviolet wavelengths 2023 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques 1 citations Investigation of the resolution limit of Talbot lithography with compact EUV exposure tools 2023 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques 2 citations Towards the resolution limit of Talbot lithography with compact EUV exposure tools 2022 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques 1 citations Design and realization of an industrial stand-alone EUV resist qualification setup 2020 conference-paper Engineering Advancements in Photolithography Techniques 2 citations Computational proximity lithography with extreme ultraviolet radiation 2020 Optics Express article Engineering Advancements in Photolithography Techniques Open access 6 citations 6 results References 0