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• ▲ Hendrik Bluhm

  Forschungszentrum Jülich · Jülich Aachen Research Alliance Physics and Astronomy
  5.59k

  citations

  31

  h-index

  52

  Aachen papers
• ▲ Lars R. Schreiber

  Forschungszentrum Jülich · Jülich Aachen Research Alliance Physics and Astronomy
  2.04k

  citations

  19

  h-index

  62

  Aachen papers
• ▲ Jan Klos

  Forschungszentrum Jülich · Jülich Aachen Research Alliance Physics and Astronomy
  59

  citations

  5

  h-index

  8

  Aachen papers
• ▲ Malte Neul

  Forschungszentrum Jülich · Jülich Aachen Research Alliance Engineering
  33

  citations

  4

  h-index

  5

  Aachen papers

4 results

• Fabrication of gate electrodes for scalable quantum computing using CMOS industry compatible e-beam lithography and numerical simulation of the resulting quantum device

  2023 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques

  2

  citations

1 result