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Residual stress measurement of physical vapor deposition (PVD) AlTiN thin films - a comparative study of x-Ray diffraction-, Raman spectroscopic and ring core method2026 The International Journal of Advanced Manufacturing Technology article Engineering Metal and Thin Film Mechanics Open access
Hilke Petersen, Arnd Heckemeyer, Bernd Breidenstein, Christoph Kahra, Sebastian Herbst, Finn Rümenapf, +10 more
1citations -
Dispersive Spectrometry At Terahertz Frequencies for Probing the Quality of NbTiN Superconducting Films2022 IEEE Transactions on Applied Superconductivity article Physics and Astronomy Superconducting and THz Device Technology Open access
Andrey V. Khudchenko, Bram Lap, Kirill I. Rudakov, Ronald Hesper, V. P. Koshelets, Pavel N. Dmitriev, +6 more
6citations
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