Papers matching “diffractive optical elements” 10
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Broadband scatterometry at extreme ultraviolet wavelengths for nanograting characterization2021 Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV conference-paper Engineering Advancements in Photolithography Techniques
Seyed moein Ghafoori, Lukas Bahrenberg, Sven Glabisch, Sophia Schroeder, Serhiy Danylyuk, Sascha Brose, +3 more
1citations
10 results