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Investigation of the resolution limit of Talbot lithography with compact EUV exposure tools2023 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
2citations -
A forming limit framework accounting for various failure mechanisms: Localization, ductile and cleavage fracture2024 International Journal of Plasticity article Engineering Metal Forming Simulation Techniques Open access
Fuhui Shen, Yannik Sparrer, Jing Rao, Markus Könemann, Sebastian Münstermann, Junhe Lian
50citations -
First detection of collective oscillations of a stored deuteron beam with an amplitude close to the quantum limit2021 Physical Review Accelerators and Beams article Engineering Particle accelerators and beam dynamics Open access
J. Slim, Nikolai N. Nikolaev, F. Rathmann, A. Wirzba, A. Nass, V. Hejny, +38 more
12citations -
Towards the resolution limit of Talbot lithography with compact EUV exposure tools2022 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
1citations