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Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist2022 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques Open access
David J. Thoen, Vignesh Murugesan, Alejandro Pascual Laguna, K. Karatsu, Akira Endo, J. J. A. Baselmans
10citations -
Process zone morphology and melt dynamics in laser remote fusion cutting (RFC) revealed by high-speed X-ray imaging2024 Optics and Lasers in Engineering article Engineering Laser Material Processing Techniques Open access
Silvana Burger, Carola Forster, Christoph Spurk, Marc Hummel, Alexander M. Olowinsky, Felix Beckmann, +2 more
2citations
3 results