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Papers matching “PZT thin films” 1

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Heat generation in PZT MEMS actuator arrays
2022 Applied Physics Letters article Engineering Advanced MEMS and NEMS Technologies

Charalampos Fragkiadakis, Subramanian Sivaramakrishnan, Thorsten Schmitz-Kempen, Peter P. Mardilovich, Susan E. Trolier-McKinstry

9

citations

1 result