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Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta2O5Films Prepared by Atomic Layer Deposition2022 physica status solidi (a) article Chemical Engineering Analytical Chemistry and Sensors Open access
Denise Molinnus, Heiko Iken, Anna Lynn Johnen, Benjamin Richstein, Lena Hellmich, Arshak Poghossian, +2 more
16citations
2 results