July 01, 2026 article Application and prospect of electron beam lithography technology Chinese Journal of Semiconductors DOI: 10.3724/cjos.2025.045 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 0 References 2 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Proximity‐Effect‐Induced Superconductivity in Nb/Sb2Te3‐Nanoribbon/Nb Junctions 2020 Annalen der Physik article Physics and Astronomy Topological Materials and Phenomena Open access 11 citations High‐Density Flexible Neural Implants with Submicron Feedline Resolution 2025 Advanced Electronic Materials article Neuroscience Neuroscience and Neural Engineering Open access 7 citations 2 results