August 27, 2026 article Open access Toward High‐Resolution Polymeric Neural Interfaces: A Practical Guide for Electron Beam Lithography Advanced Science DOI: 10.1002/advs.76948 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 1 References 3 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist 2022 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques Open access 10 citations High‐Density Flexible Neural Implants with Submicron Feedline Resolution 2025 Advanced Electronic Materials article Neuroscience Neuroscience and Neural Engineering Open access 7 citations Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability 2021 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques 6 citations 3 results