March 04, 2026 article A Novel Optimization and Yield Analysis Method for MEMS Devices Combining Bi-Fidelity Deep Neural Network and Active Subspace Journal of Microelectromechanical Systems DOI: 10.1109/jmems.2026.3667598 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 1 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies 2024 Microsystems & Nanoengineering article Engineering Advanced MEMS and NEMS Technologies Open access 23 citations 1 result