January 01, 2026 article 基于纳米计量测试与反馈的电子束光刻拼接误差预补偿方法（特邀） Acta Optica Sinica DOI: 10.3788/aos251742 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 0 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Light scattering from diffraction gratings 2023 International Conference on Space Optics (ICSO) conference-paper Materials Science Optical Coatings and Gratings 2 citations 1 result