January 01, 1995 book Ion Implantation: Basics to Device Fabrication Springer eBooks DOI: 10.1007/978-1-4615-2259-1 OpenAlex Authors 0 Author list not loaded yet. Cited by 2 stored of 170 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K 2024 Physical Review Materials article Physics and Astronomy Semiconductor materials and interfaces Open access 8 citations Low-energy Se ion implantation in MoS2 monolayers 2022 npj 2D Materials and Applications article Materials Science 2D Materials and Applications Open access 41 citations 2 results References 0