Multimodal In Situ Electron Microscopy Platform for Correlative Electro-Thermal Characterization and Failure Analysis

Proceedings - International Symposium for Testing and Failure Analysis, vol. 85212, pp. 567–568

Abstract

Abstract We introduce a correlative in situ platform for electro-thermal studies in both TEM and SEM using the same MEMS-based Nano-Chip. Equipped with up to eight electrodes, the chip enables precise electrical biasing and localized heating of as prepared samples under real operating conditions. A dedicated SEM holder ensures seamless, damage-free transfer from TEM, combining atomic-scale imaging with SEM analytics (EDX, EBSD, TKD) and optional AFM integration. Designed for semiconductor materials, the system captures real-time structural evolution during heating and biasing, delivering artifact-free, multimodal insights for semiconductor reliability, device optimization, and advanced materials development.

Authors 8

1. Hongkui Zheng

   Denssolutions (Netherlands)

   Affiliation as printed

   DENSsolutions B.V., Informaticalaan 12, 2628 ZD Delft , The Netherlands

2. Yevheniy V. Pivak

   Denssolutions (Netherlands)

   Affiliation as printed

   DENSsolutions B.V., Informaticalaan 12, 2628 ZD Delft , The Netherlands

3. Christian Deen-van Rossum

   Denssolutions (Netherlands)

   Affiliation as printed

   DENSsolutions B.V., Informaticalaan 12, 2628 ZD Delft , The Netherlands

4. Mia Andersen

   Denssolutions (Netherlands)

   Affiliation as printed

   DENSsolutions B.V., Informaticalaan 12, 2628 ZD Delft , The Netherlands

5. Merijn Pen

   Denssolutions (Netherlands)

   Affiliation as printed

   DENSsolutions B.V., Informaticalaan 12, 2628 ZD Delft , The Netherlands

6. Shibabrata Basak

   Forschungszentrum Jülich

   Affiliation as printed

   Institute of Energy Technologies - Fundamental Electrochemistry (IET-1) , Forschungszentrum Jülich GmbH, Jülich, Germany

7. Rüdiger‐A. Eichel Aachen Faculty of Mechanical Engineering Institute of Physical Chemistry

   Forschungszentrum Jülich · RWTH Aachen University

   Affiliation as printed

   Faculty of Mechanical Engineering, RWTH Aachen University , Aachen, Germany

   Institute of Energy Technologies - Fundamental Electrochemistry (IET-1) , Forschungszentrum Jülich GmbH, Jülich, Germany

   Institute of Physical Chemistry, RWTH Aachen University , Aachen, Germany

8. H. Hugo Pérez Garza

   Denssolutions (Netherlands)

   Affiliation as printed

   DENSsolutions B.V., Informaticalaan 12, 2628 ZD Delft , The Netherlands