X-ray reflectivity from micrometre-scaled surfaces using nanobeams

Journal of Applied Crystallography, vol. 58, pp. 1978–1985

Abstract

Sample and diffractometer alignment for grazing-incidence X-ray measurements become ever more crucial once the beam and surface area of interest reach the nanometre scale. Here we show how a point of interest on a surface can be kept in the beam while measuring X-ray reflectivity, even if it is not in the centre of rotation, either because of systematic errors or additional unwanted angle-dependent sample movement. This can be achieved by a 1D trajectory scan varying the angle of incidence (θ), the detector angle (2θ) and the position of the sample along one axis in the scattering plane. As an example, we show the results of X-ray reflectivity measured from a 10 × 10 µm Au island using a 90 nm beam. Data analysis is presented which considers the angle-dependent X-ray beam footprint illuminating both the Au island and the surrounding support.

Authors 9

1. Vedran Vonk

   Deutsches Elektronen-Synchrotron DESY

   Affiliation as printed

   Centre for X-ray and Nano Science CXNS Deutsches Elektronen-Synchrotron DESY Notkestraße 85 22607 Hamburg Germany

   Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany

2. Steffen Tober

   Forschungszentrum Jülich

   Affiliation as printed

   Institute for a Sustainable Hydrogen Economy (INW), Forschungszentrum Jülich GmbH, Marie-Curie-Straße 5, 52428 Jülich, Germany

3. Steven John Leake

   European Synchrotron Radiation Facility

   Affiliation as printed

   ESRF, The European Synchrotron, 71 Avenue des Martyrs, CS40220, 38043 Grenoble Cedex 9, France

4. Breno Rabelo Coutinho Saraiva

   Deutsches Elektronen-Synchrotron DESY

   Affiliation as printed

   Centre for X-ray and Nano Science CXNS Deutsches Elektronen-Synchrotron DESY Notkestraße 85 22607 Hamburg Germany

   Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany

5. Lisa Randolph

   Forschungszentrum Jülich

   Affiliation as printed

   Institute for a Sustainable Hydrogen Economy (INW), Forschungszentrum Jülich GmbH, Marie-Curie-Straße 5, 52428 Jülich, Germany

6. Arti Dangwal Pandey

   Deutsches Elektronen-Synchrotron DESY

   Affiliation as printed

   Centre for X-ray and Nano Science CXNS Deutsches Elektronen-Synchrotron DESY Notkestraße 85 22607 Hamburg Germany

   Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany

7. Thomas Florian Keller

   Universität Hamburg · Deutsches Elektronen-Synchrotron DESY

   Affiliation as printed

   Centre for X-ray and Nano Science CXNS Deutsches Elektronen-Synchrotron DESY Notkestraße 85 22607 Hamburg Germany

   Physics Department, University of Hamburg, 20355 Hamburg, Germany

   Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany

8. Hans‐Georg Steinrück Aachen Institute of Physical Chemistry

   Forschungszentrum Jülich · RWTH Aachen University

   Affiliation as printed

   Institute for a Sustainable Hydrogen Economy (INW), Forschungszentrum Jülich GmbH, Marie-Curie-Straße 5, 52428 Jülich, Germany

   RWTH Aachen University, Institute of Physical Chemistry, Landoltweg 2, 52074 Aachen, Germany

9. Andreas Stierle

   Universität Hamburg · Deutsches Elektronen-Synchrotron DESY

   Affiliation as printed

   Centre for X-ray and Nano Science CXNS Deutsches Elektronen-Synchrotron DESY Notkestraße 85 22607 Hamburg Germany

   Physics Department, University of Hamburg, 20355 Hamburg, Germany

   Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany