July 22, 2025 article Open access AI-Powered Next-Generation Technology for Semiconductor Optical Metrology: A Review Micromachines DOI: 10.3390/mi16080838 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 10 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Nanoscale grating characterization through EUV spectroscopy aided by machine learning techniques 2020 conference-paper Engineering Advancements in Photolithography Techniques 5 citations 1 result