April 24, 2025 conference-paper Lab-based multi-wavelength EUV diffractometry for critical dimension metrology DOI: 10.1117/12.3050342 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 1 References 2 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup 2020 Optics Express article Engineering Advancements in Photolithography Techniques Open access 16 citations Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation 2022 Applied Optics article Engineering Advancements in Photolithography Techniques 12 citations 2 results