Microfluidic Tissue Barrier Sensor Chip with Integrated Microelectrodes and Ultrathin Microporous Membrane

Proceedings, IEEE micro electro mechanical systems, pp. 426–429

Abstract

We present a novel silicon-based organ-on-chip (OoC) device featuring integrated microelectrodes to assess barrier function in biological tissue co-cultures. The microfluidic device consists of two vertically-stacked microchannels separated by a submicron-thin, microporous silicon nitride membrane, enabling in vivo-like proximity for co-cultured tissues. The integrated four-probe electrode geometry on slanted microchannel sidewalls ensures unobstructed optical access to the membrane and consistent measurement repeatability. Experimental validation through electrical impedance spectroscopy supported the device’s sensitivity to sodium chloride concentration. Fabricated through a scalable, wafer-scale batch process, the device additionally demonstrated biocompatibility and optical transparency, representing a significant advancement for in situ tissue barrier assessments.

Authors 8

1. Pratik V. Tawade

   Delft University of Technology

   Affiliation as printed

   Delft University of Technology,Department of Microelectronics,The Netherlands

2. Hande Aydoğmuş

   Delft University of Technology

   Affiliation as printed

   Delft University of Technology,Department of Microelectronics,The Netherlands

3. Lovro Ivancevic

   Delft University of Technology

   Affiliation as printed

   Delft University of Technology,Department of Microelectronics,The Netherlands

4. Jia-Jun Yeh

   Delft University of Technology

   Affiliation as printed

   Delft University of Technology,Department of Microelectronics,The Netherlands

5. Vasiliki Gkouzioti Aachen department of Neurology, Leiden

   Leiden University Medical Center

   Affiliation as printed

   Leiden University Medical Center,Department of Neurology,Leiden,The Netherlands

6. Jean‐Philippe Frimat Aachen department of Neurology, Leiden

   Leiden University Medical Center

   Affiliation as printed

   Leiden University Medical Center,Department of Neurology,Leiden,The Netherlands

7. Jaap M. J. den Toonder

   Eindhoven University of Technology

   Affiliation as printed

   Eindhoven University of Technology,Department of Mechanical Engineering,The Netherlands

8. Massimo Mastrangeli

   Delft University of Technology

   Affiliation as printed

   Delft University of Technology,Department of Microelectronics,The Netherlands