February 17, 2025 preprint Open access Suspended graphene-based NEMS accelerometers with direct electrical readout Research Square DOI: 10.21203/rs.3.rs-6011686/v1 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 0 References 3 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications 2020 Microsystems & Nanoengineering article Engineering Advanced MEMS and NEMS Technologies Open access cited by 1 patent 90 citations Multi-layer graphene pirani pressure sensors 2021 Nanotechnology article Materials Science Graphene research and applications Open access 27 citations High-Yield Large-Scale Suspended Graphene Membranes over Closed Cavities for Sensor Applications 2024 ACS Nano article Materials Science Graphene research and applications Open access 27 citations 3 results