January 01, 2024 article Future Materials for Beyond Si Integrated Circuits: A Perspective IEEE Transactions on Materials for Electron Devices DOI: 10.1109/tmat.2024.3497835 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 11 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Reaction-diffusion model for hydrogen release from PECVD silicon nitride 2023 IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference (IITC/MAM) conference-paper Engineering Semiconductor materials and devices 3 citations 1 result