Multiparameter admittance spectroscopy for investigating defects in MoS${_2}$ thin film MOSFETs

arXiv (Cornell University)

Abstract

A method for assessing the quality of electronic material properties of thin-film metal oxide semiconductor field-effect transistors (MOSFETs) is presented. By investigating samples with MOCVD-grown MoS${_2}$ channels exposed to atmospheric conditions, the existence of electron traps in MoS${_2}$ and at the interface between the gate insulator and the thin-film MoS${_2}$ are revealed. Differential conductance and capacitance data of the transistor channels are plotted as 3D surfaces on a base plane spanned by the measurement frequency versus the gate voltage. The existence of defects is confirmed by comparison with ideal results from a theoretical model.

Authors 7

1. Eros Reato Aachen AMO GmbH Chair of Electronic Devices

   RWTH Aachen University · AMO (Germany)

   Affiliation as printed

   AMO GmbH , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

   Chair of Electronic Devices , RWTH Aachen University , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

2. Ardeshir Esteki Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   Chair of Electronic Devices , RWTH Aachen University , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

3. Benny Ku Aachen AMO GmbH Chair of Electronic Devices

   RWTH Aachen University · AMO (Germany)

   Affiliation as printed

   AMO GmbH , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

   Chair of Electronic Devices , RWTH Aachen University , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

4. Zhenxing Wang Aachen AMO GmbH

   AMO (Germany)

   Affiliation as printed

   AMO GmbH , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

5. M. Heuken Aachen Compound Semiconductor Technology

   RWTH Aachen University · Aixtron (Germany)

   Affiliation as printed

   AIXTRON SE , Dornkaulstrasse 2 , 52134 Herzogenrath , Germany

   Compound Semiconductor Technology , RWTH Aachen University , Sommerfeldstrasse 18 , 52074 Aachen , Germany

6. Max C. Lemme Aachen AMO GmbH Chair of Electronic Devices

   RWTH Aachen University · AMO (Germany)

   Affiliation as printed

   AMO GmbH , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

   Chair of Electronic Devices , RWTH Aachen University , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany

7. Olof Engström Aachen AMO GmbH

   AMO (Germany)

   Affiliation as printed

   AMO GmbH , Otto-Blumenthal-Strasse 25 , 52074 Aachen , Germany