Electrostatic interference control of a high-energy coherent electron beam using a three-element Boersch phase shifter

arXiv (Cornell University)

Abstract

In contrast to static holographic phase shifters, which are restricted to specific electron beam energies and microscope settings, Boersch phase shifters are promising for creating programmable arrays for generating two- and three-dimensional electron beam patterns. We recently demonstrated a three-element Boersch phase shifter device [Thakkar et al., J. Appl. Phys. 128 (2020), 134502], which was fabricated by electron beam lithography and is compatible with up-scaling. However, it suffers from parasitic beam deflection and resulting cross-talk. Here, we report a five-layer phase shifter device, which is based on a metal-insulator-metal-insulator-metal structure (as originally envisioned by Boersch) that reduces cross-talk. We demonstrate a three-element Boersch phase shifter that shows minimal beam deflection of voltage-controlled three-electron-beam interference patterns in a transmission electron microscope operated at 200 keV. The feasibility of using such multi-element phase shifter arrays is discussed.

Authors 6

1. Pooja Thakkar

   University of Basel · Paul Scherrer Institute · Swiss Nanoscience Institute

   Affiliation as printed

   Division of Biology and Chemistry , Paul Scherrer Insitut , Forschungsstrasse 111 , 5232 Villigen PSI , Switzerland

   Swiss Nanoscience Institute , University of Basel , Klingelbergstrasse 82 , 4056 Basel , Switzerland

2. Vitaliy A. Guzenko

   Paul Scherrer Institute

   Affiliation as printed

   Photon Science Division , Paul Scherrer Institut , Forschungsstrasse 111 , 5232 Villigen PSI , Switzerland

3. Peng‐Han Lu

   Ernst Ruska Centre

   Affiliation as printed

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute , Forschungszentrum Jülich , Wilhelm-Johnen-Strasse , 52425 Jülich , Germany

4. Rafal E. Dunin‐Borkowski Aachen

   Ernst Ruska Centre · RWTH Aachen University

   Affiliation as printed

   Aachen University , Ahornstraße 55 , 52074 Aachen , Germany

   Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute , Forschungszentrum Jülich , Wilhelm-Johnen-Strasse , 52425 Jülich , Germany

5. Jan Pieter Abrahams
6. Soichiro Tsujino

   University of Basel · Paul Scherrer Institute · Swiss Nanoscience Institute

   Affiliation as printed

   Division of Biology and Chemistry , Paul Scherrer Insitut , Forschungsstrasse 111 , 5232 Villigen PSI , Switzerland

   Swiss Nanoscience Institute , University of Basel , Klingelbergstrasse 82 , 4056 Basel , Switzerland