Compact EUV Sources for Metrology and Irradiation Experiments

SPIE eBooks

Abstract

This chapter focuses on the concept of a special type of discharge-based source. It summarizes the current status of this source and gives perspectives on further improvements in its long-term stability and integration into systems.

Authors 4

1. Jochen Vieker Aachen Fraunhofer-Institut für Lasertechnik ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer-Institut für Lasertechnik ILT

2. Florian Melsheimer

   Forschungszentrum Jülich

   Affiliation as printed

   Forschungszentrum Jülich GmbH

3. Klaus Bergmann Aachen Fraunhofer-Institut für Lasertechnik ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer-Institut für Lasertechnik ILT

4. Alexander von Wezyk
   Affiliation as printed

   AMPHOS GmbH