Micro-Joule heater and temperature sensor array on a suspended silicon nitride membrane for measurement of in-plane thin film thermal diffusivity

Sensors and Actuators A Physical, vol. 362, pp. 114635

Authors 5

1. Felix Jiang Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 18-24, Aachen 52074, North Rhine-Westphalia, Germany

2. Meguya Ryu

   Tokyo Institute of Technology · National Metrology Institute of Japan · National Institute of Advanced Industrial Science and Technology

   Affiliation as printed

   National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8563, Ibaraki, Japan

   School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8550, Japan

3. Junko Morikawa

   Tokyo Institute of Technology

   Affiliation as printed

   School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8550, Japan

4. Sven Ingebrandt Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 18-24, Aachen 52074, North Rhine-Westphalia, Germany

5. Xuan Thang Vu corresponding Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 18-24, Aachen 52074, North Rhine-Westphalia, Germany