June 22, 2023 article Ab initio supported study on the selective adsorption-induced microstructural difference of (Ti,Al)N/TiN and (Ti,Al)N/ZrN multilayers Applied Surface Science DOI: 10.1016/j.apsusc.2023.157861 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 3 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Deviations between film and target compositions induced by backscattered Ar during sputtering from M2-Al-C (M = Cr, Zr, and Hf) composite targets 2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics 14 citations 1 result