February 02, 2023 article TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication IEEE Transactions on Semiconductor Manufacturing DOI: 10.1109/tsm.2023.3240033 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 16 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Iterative model-based experimental design for efficient uncertainty minimization of chemical mechanisms 2020 Proceedings of the Combustion Institute article Chemical Engineering Advanced Combustion Engine Technologies 22 citations 1 result