Microfluidic-Based Electrical Impedance Spectroscopy System Using Multilevel Lamination of Dry Film Photoresist

International Workshop on Impedance Spectroscopy (IWIS), pp. 11–14

Abstract

Micro-electro-mechanical systems (MEMS) often require thick structures with high aspect ratios. To fulfill this specification, lamination of thick dry film photoresists (DFR) is preferred. To demonstrate the capability, we developed a microfluidic system, which consists of a 3-level laminated SUEX DFR with an aperture and served as a hydrodynamic trap. Two embedded vertically arranged electrodes around the aperture enabled electrical impedance spectroscopy (EIS) on single microspheres. In a proof-of-concept, EIS measurements were carried out between 500 Hz and 1 MHz on a single poly(methyl methacrylate) (PMMA) sphere with a diameter of$100\ \mu \mathrm{m}$. The spectra were analyzed using an equivalent electric circuit model. A significant increase in impedance values was obtained by trapping the PMMA sphere in the aperture.

Authors 5

1. Yuan Cao Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University,Aachen,Germany

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Aachen, Germany

2. Julia Floehr Aachen

   Universitätsklinikum Aachen · RWTH Aachen University

   Affiliation as printed

   Helmholtz-Institute for Biomedical Engineering, RWTH Aachen University Hospital,Aachen,Germany

   Helmholtz-Institute for Biomedical Engineering, RWTH Aachen University Hospital, Aachen, Germany

3. Erkan Yılmaz Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University,Aachen,Germany

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Aachen, Germany

4. Tom Kremers Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University,Aachen,Germany

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Aachen, Germany

5. Uwe Schnakenberg Aachen Institute of Materials in Electrical Engineering 1

   RWTH Aachen University

   Affiliation as printed

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University,Aachen,Germany

   Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Aachen, Germany