Voltage-controlled three-electron-beam interference by a three-element Boersch phase shifter with top and bottom shielding electrodes

International Vacuum Nanoelectronics Conference, pp. 1–2

Abstract

We report a three-element Boersch phase shifter for the wavefront manipulation of coherent electron beam. A device with five-layer structure is fabricated by the state-of-the-art lithography. In a recently reported simplified three-layer device, parasitic beam deflection by contacting wires was observed, which poses a critical obstacle for device upscaling. To minimize the effect, a five-layer structure including a top-contact-shielding electrode is adopted in this work. Despite the mechanical stresses caused by the additional layers, we successfully produced the five-layer device on a suspended thin silicon nitride membrane and tested its performance of the voltage-controlled phase shift of coherent electron beam. The experiment confirmed that the parasitic beam deflection was suppressed. Our work paves a way toward the realization of a multi-element Boersch phase shifter for a programmable holographic synthesis of electron waves in two- and three-dimensions.

Authors 6

1. Pooja Thakkar

   University of Basel · Paul Scherrer Institute · Swiss Nanoscience Institute

   Affiliation as printed

   Division of Biology and Chemistry, Paul Scherrer Insitut, Villigen PSI, Switzerland

   Swiss Nanoscience Institute, University of Basel, Basel, Switzerland

2. Vitaliy A. Guzenko

   Paul Scherrer Institute

   Affiliation as printed

   Photon Science Division, Paul Scherrer Institut, Villigen PSI, Switzerland

3. Peng‐Han Lu Aachen

   Forschungszentrum Jülich · Ernst Ruska Centre · RWTH Aachen University

   Affiliation as printed

   Ernst Ruska-Centre for Microscopy and Spectroscopy With Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany

   RWTH Aachen University, Aachen, Germany

4. Rafal E. Dunin‐Borkowski

   Forschungszentrum Jülich · Ernst Ruska Centre

   Affiliation as printed

   Ernst Ruska-Centre for Microscopy and Spectroscopy With Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany

5. Jan Pieter Abrahams

   University of Basel · Paul Scherrer Institute · Swiss Nanoscience Institute

   Affiliation as printed

   Biozentrum, University of Basel, Basel, Switzerland

   Division of Biology and Chemistry, Paul Scherrer Insitut, Villigen PSI, Switzerland

   Swiss Nanoscience Institute, University of Basel, Basel, Switzerland

6. Soichiro Tsujino

   University of Basel · Paul Scherrer Institute · Swiss Nanoscience Institute

   Affiliation as printed

   Division of Biology and Chemistry, Paul Scherrer Insitut, Villigen PSI, Switzerland

   Swiss Nanoscience Institute, University of Basel, Basel, Switzerland