January 01, 2021 conference-paper Open access An Introduction to Lithography Machine Advances in Social Science, Education and Humanities Research/Advances in social science, education and humanities research DOI: 10.2991/assehr.k.211011.010 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 2 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Feature Selection for Fault Detection and Prediction based on Event Log Analysis 2022 ACM SIGKDD Explorations Newsletter article Computer Science Software System Performance and Reliability Open access 6 citations 1 result References 0