September 30, 2021 article Open access Femtosecond laser micromachining for integrated quantum photonics Nanophotonics DOI: 10.1515/nanoph-2021-0419 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 6 stored of 122 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Topographical evolution and simulation of SLE-fabricated fused silica surfaces in spray-burner nozzles during chemical etching 2026 Optics Express article Engineering Laser Material Processing Techniques Open access 0 citations Towards Laser-Based Optic Manufacturing for Novel Fiber-Chip-Couplers through Selective Laser-Induced Etching 2026 Springer proceedings in physics conference-paper Engineering Laser Material Processing Techniques 0 citations Influence of flexible multibeam intensity distributions on selective laser-induced etching process regimes 2024 Optics Express article Engineering Laser Material Processing Techniques Open access 5 citations Selective laser-induced etching (SLE) of transparent materials for microelectronic components and quantum computing applications 2024 conference-paper Engineering Laser Material Processing Techniques 2 citations Dynamic correction of optical aberrations for height-independent selective laser induced etching processing strategies 2023 Optics Express article Engineering Laser Material Processing Techniques Open access 5 citations Selective laser-induced etching for 3D ion traps 2023 conference-paper Engineering Laser Material Processing Techniques 4 citations 6 results References 0