W2897607471 OpenAlex Authors 0 Author list not loaded yet. Cited by 2 stored of 0 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology 2025 Metrologia article Engineering Advanced Measurement and Metrology Techniques Open access 4 citations Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings 2020 conference-paper Materials Science Optical Coatings and Gratings 5 citations 2 results References 0