January 01, 2001 book-chapter Why is (111) Silicon a Better Mechanical Material for MEMS? Springer eBooks DOI: 10.1007/978-3-642-59497-7_157 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 107 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies 2024 Microsystems & Nanoengineering article Engineering Advanced MEMS and NEMS Technologies Open access 23 citations 1 result References 0