November 30, 2009 review Atomic Layer Deposition: An Overview Chemical Reviews DOI: 10.1021/cr900056b OpenAlex Authors 0 Author list not loaded yet. Cited by 9 stored of 5,859 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access ALD-Induced Changes in Lithium Dynamics throughout Garnet-Type Solid-State Electrolytes: Insights from 7 Li NMR T 1 Relaxation 2026 The Journal of Physical Chemistry Letters article Engineering Advanced Battery Materials and Technologies Open access 0 citations Tailoring Li–Al–O Interphases in Garnet-Type Solid-State Electrolytes via Powder Atomic Layer Deposition 2026 ACS Applied Materials & Interfaces article Engineering Advanced Battery Materials and Technologies Open access 5 citations Can thin films deposited by ALD reduce the outgassing? A case study by dynamic outgassing on 3D-printed polyether ether ketone (PEEK) 2025 IOP Conference Series Materials Science and Engineering conference-paper Engineering Semiconductor materials and devices Open access 0 citations Tuning the Permeation Properties of Poly(1‐trimethylsilyl‐1‐propyne) by Vapor Phase Infiltration Using Trimethylaluminum 2024 Advanced Materials Interfaces article Engineering Membrane Separation and Gas Transport Open access 3 citations Phase interface engineering enables state-of-the-art half-Heusler thermoelectrics 2024 Nature Communications article Materials Science Advanced Thermoelectric Materials and Devices Open access 60 citations Fabrication of semi-transparent SrTaO 2 N photoanodes with a GaN underlayer grown via atomic layer deposition 2022 Green Chemistry Letters and Reviews article Energy Advanced Photocatalysis Techniques Open access cited by 1 patent 10 citations Fabrication of Semi-Transparent SrTaO2N Photoanodes with a GaN Underlayer Grown via Atomic Layer Deposition 2021 preprint Energy Advanced Photocatalysis Techniques Open access 1 citations Fabrication of Semi-Transparent SrTaO2N Photoanodes with a GaN Underlayer Grown via Atomic Layer Deposition 2021 ChemRxiv preprint Energy Advanced Photocatalysis Techniques Open access 0 citations Hybrid Devices by Selective and Conformal Deposition of PtSe2 at Low Temperatures 2021 Advanced Functional Materials article Materials Science 2D Materials and Applications Open access 44 citations 9 results References 0