May 01, 1982 article Silicon as a mechanical material Proceedings of the IEEE DOI: 10.1109/proc.1982.12331 OpenAlex Authors 0 Author list not loaded yet. Cited by 2 stored of 2,902 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Phonon-Trapping-Enhanced Energy Resolution in Superconducting Single-Photon Detectors 2021 Physical Review Applied article Physics and Astronomy Superconducting and THz Device Technology Open access 52 citations Sonderverfahren 2020 Springer eBooks book-chapter Engineering Advanced machining processes and optimization 1 citations 2 results References 0