April 01, 2003 article Electron beam lithography in nanoscale fabrication: recent development IEEE Transactions on Electronics Packaging Manufacturing DOI: 10.1109/tepm.2003.817714 OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 534 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Bioinspired micro- and nano-structured neural interfaces 2022 Nanotechnology article Neuroscience Neuroscience and Neural Engineering 15 citations Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system 2021 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques Open access 12 citations Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system 2021 RWTH Publications (RWTH Aachen) article Engineering Advancements in Photolithography Techniques Open access 8 citations 3 results References 0