August 01, 2000 article Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization Annual Review of Materials Science DOI: 10.1146/annurev.matsci.30.1.363 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 365 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Perspective on pathways towards responsible surface engineering 2024 Surface and Coatings Technology article Engineering Surface Treatment and Coatings Open access 13 citations 1 result References 0