January 01, 1991 article Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor IEEE Journal of Solid-State Circuits DOI: 10.1109/4.104194 OpenAlex Authors 0 Author list not loaded yet. Cited by 2 stored of 111 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Multiscale modelling of MEMS based Pirani gauges 2023 International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design conference-paper Engineering Advanced MEMS and NEMS Technologies 1 citations Multi-layer graphene pirani pressure sensors 2021 Nanotechnology article Materials Science Graphene research and applications Open access 27 citations 2 results References 0