November 01, 2002 article Generalized scanning beam interference lithography system for patterning gratings with variable period progressions Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena DOI: 10.1116/1.1520563 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 48 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography 2022 Optics Express article Engineering Laser Material Processing Techniques Open access 13 citations 1 result References 0