April 22, 2009 article Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates The Journal of Physical Chemistry C DOI: 10.1021/jp900915r OpenAlex Authors 0 Author list not loaded yet. Cited by 4 stored of 206 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Topographical evolution and simulation of SLE-fabricated fused silica surfaces in spray-burner nozzles during chemical etching 2026 Optics Express article Engineering Laser Material Processing Techniques Open access 0 citations Influence of flexible multibeam intensity distributions on selective laser-induced etching process regimes 2024 Optics Express article Engineering Laser Material Processing Techniques Open access 5 citations Selective laser-induced etching for novel 3D microphotonic devices 2024 conference-paper Engineering Laser Material Processing Techniques 3 citations Dynamic correction of optical aberrations for height-independent selective laser induced etching processing strategies 2023 Optics Express article Engineering Laser Material Processing Techniques Open access 5 citations 4 results References 0