February 09, 2009 article Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis Applied Physics Letters DOI: 10.1063/1.3079394 OpenAlex Authors 0 Author list not loaded yet. Cited by 4 stored of 28 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology 2025 Metrologia article Decision Sciences Scientific Measurement and Uncertainty Evaluation Open access 5 citations EUV Measurement Technologies 2023 RWTHedition book-chapter Engineering Advancements in Photolithography Techniques 0 citations High-precision optical constant characterization of materials in the EUV spectral range: from large research facilities to laboratory-based instruments 2022 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques 2 citations Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet 2022 Journal of Micro/Nanopatterning Materials and Metrology article Engineering Advancements in Photolithography Techniques Open access 9 citations 4 results References 0