May 01, 1999 article SiC film deposition by DC magnetron sputtering Thin Solid Films DOI: 10.1016/s0040-6090(99)00070-x OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 33 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Synthesis and Characterization of Nitrogen-Doped Crystallized SiC Films from Liquid Precursors 2025 ACS Applied Electronic Materials article Engineering Silicon Carbide Semiconductor Technologies Open access 3 citations 1 result References 0