April 01, 2002 article Silicon integrated circuit technology from past to future Microelectronics Reliability DOI: 10.1016/s0026-2714(02)00032-x OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 121 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Analyzing Carrier Density and Hall Mobility in Impurity‐Free Silicon Virtually Doped by External Defect Placement 2024 Advanced Functional Materials article Engineering Advancements in Semiconductor Devices and Circuit Design 10 citations 1 result References 0