November 01, 2012 article Open access Hydrogenated amorphous silicon carbon nitride films prepared by PECVD technology: properties Journal of Electrical Engineering DOI: 10.2478/v10187-012-0049-z Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 23 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Synthesis and Characterization of Nitrogen-Doped Crystallized SiC Films from Liquid Precursors 2025 ACS Applied Electronic Materials article Engineering Silicon Carbide Semiconductor Technologies Open access 3 citations 1 result References 0