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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices2024 arXiv (Cornell University) preprint Engineering Acoustic Wave Resonator Technologies Open access
Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, Sebastian Siol
0citations -
$\textit{Ab initio}$-guided X-ray photoelectron spectroscopy quantification of Ti vacancies in Ti$_{1-δ}$O$_x$N$_{1-x}$ thin films2021 arXiv (Cornell University) preprint Materials Science Electron and X-Ray Spectroscopy Techniques Open access
Pavel Ondračka, Marcus Hans, Damian M. Holzapfel, Daniel Primetzhofer, David Holec, Jochen M. Schneider
0citations
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