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Papers matching “sputtering parameters” 26

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Interface-controlled defect engineering in TiN/TaN superlattices for enhanced hardness and fracture toughness
2026 Materials & Design article Engineering Metal and Thin Film Mechanics Open access

Zecui Gao, Qimin Wang, Julian Buchinger, Nikola Koutná, Marcus Hans, Zaoli Zhang, +3 more

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