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Papers matching “reactive sputtering” 3

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Phase Evolution, Structure and Mechanical Properties of CrHfMoTaW–N High-entropy Thin Films Deposited by Reactive HiPIMS
2026 SSRN Electronic Journal preprint Engineering High Entropy Alloys Studies Open access

Pavel Souček, Lukáš Vrána, Matej Fekete

0

citations
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm loss
2024 preprint Engineering Photonic and Optical Devices Open access

Max C. Lemme, Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian, Rijil Thomas, Lutz Kirste, +1 more

0

citations
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm loss
2024 preprint Engineering Photonic and Optical Devices Open access

Max C. Lemme, Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian, Rijil Thomas, Lutz Kirste, +1 more

0

citations

3 results