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Papers matching “plasma-surface interaction” 1

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Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics cited by 2 patents

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, Martin Engels

12

citations

1 result